Effect of resist surface insoluble layer in attenuated phase-shift mask for window pattern formation
- Author(s):
- Publication title:
- Optical/laser microlithography VIII : 22-24 February, 1995, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2440
- Pub. Year:
- 1995
- Page(from):
- 804
- Page(to):
- 815
- Pages:
- 12
- Pub. info.:
- Bellingham, WA: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819417886 [0819417882]
- Language:
- English
- Call no.:
- P63600/2440
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Improvement of resist pattern fidelity with partial attenuated phase-shift mask
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Large assist feature phase-shift mask for sub-quarter-micrometer window pattern formation
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Attenuated phase-shift masks reducing side-lobe effect in DRAM peripheral circuit region
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Pattern dependence of mask topography effect in alternating phase-shifting masks
SPIE - The International Society of Optical Engineering |
9
Conference Proceedings
Fabricating 100-nm line patterns with high-transmittance ArF attenuated phase-shift masks
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Optical proximity correction of alternating phase-shift masks for 0.18-ヲフm KrF lithography
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Effect of pattern density for contact windows in an attenuated phase shift mask
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Self-aligned resist patterning with 172nm and 193nm backside flood exposure on attenuated phase shift masks
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Fabrication of the 70-nm line patterns with ArF chromeless phase-shift masks
SPIE-The International Society for Optical Engineering |