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Scatterometry for 0.24- to 0.70-µm developed photoresist metrology

Author(s):
Publication title:
Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2439
Pub. date:
1995
Page(from):
427
Page(to):
436
Pages:
10
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819417879 [0819417874]
Language:
English
Call no.:
P63600/2439
Type:
Conference Proceedings

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