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Characterization of aluminum nitride thin films grown by plasma source molecular-beam epitaxy

Author(s):
Publication title:
Laser-induced damage in optical materials, 1994 : 26th Annual Boulder Damage Symposium, proceedings, 24-26, October, 1994, Boulder, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2428
Pub. Year:
1995
Page(from):
362
Page(to):
369
Pages:
8
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819417763 [0819417769]
Language:
English
Call no.:
P63600/2428
Type:
Conference Proceedings

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