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Photomask fabrication of focusing diffractive optical elements using electron-beam lithography

Author(s):
Publication title:
9th Meeting on Optical Engineering in Israel : 24-26 October, 1994, Tel-Aviv, Israel
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2426
Pub. Year:
1995
Page(from):
215
Page(to):
227
Pages:
13
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819417749 [0819417742]
Language:
English
Call no.:
P63600/2426
Type:
Conference Proceedings

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