Dry etching for the fabrication of flat panel displays

Dry etching for the fabrication of flat panel displays

Author(s):

Publication title:

Liquid crystal materials, devices, and displays : 9-10 February 1995, San Jose, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2408

Pub. Year:

1995

Page(from):

215

Page(to):

219

Pages:

5

Pub. info.:

Bellingham, WA: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819417558 [0819417556]

Language:

English

Call no.:

P63600/2408

Type:

Conference Proceedings

Details

TDL ID:	ZA00057611
Series ID:	PA00000029
Conf. info. (Name):	Symposium on liquid crystal materials, devices, and displays
Conf. info. (Number):	1995
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	1995.02.09-1995.02.10
Note for article:	1995 Symposium on liquid crystal materials, devices, and displays, February 9-10, 1995, San Jose, CA, USA. 2408-27

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