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Realization of Si1-x-yGexCy/Si heterostructures by pulsed-laser-induced epitaxy of C+ implanted pseudomorphic SiGe films and of a-SiGeC:H films deposited on Si(100)

Author(s):
Publication title:
Laser-induced thin film processing : 8-10 February 1995, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2403
Pub. Year:
1995
Page(from):
362
Page(to):
373
Pages:
12
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819417503 [0819417505]
Language:
English
Call no.:
P63600/2403
Type:
Conference Proceedings

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