Blank Cover Image

Integration of Thin Film Decoupling Capacitors

Author(s):
Publication title:
27th International Symposium on Microelectronics : 15-17 November 1994, Boston, Massachusetts
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2369
Pub. Year:
1994
Page(from):
179
Page(to):
184
Pages:
6
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780930815417 [0930815416]
Language:
English
Call no.:
P63600/2369
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Integrated Decoupling Capacitors Using Pb(Zr,Ti)O3 Thin Films

Dimos, D., Lockwood, S. J., Garino, T. J., Al-Shareef, H. N., Schwartz, R. W.

MRS - Materials Research Society
7 Conference Proceedings Barium Strontium Titanate Thin Film Capacitors for Low Inductance Decoupling Applications

Baniecki, J. D., Shioga, T., Kurihara, K.

Materials Research Society
2 Conference Proceedings ELECTRICAL PROPERTIES OF SOL-GEL PZT THIN FILMS FOR DECOUPLING CAPACITOR APPLICATIONS

Schwartz, Robert W., Dimos, D., Lockwood, S. J., Torres, V. M.

MRS - Materials Research Society
8 Conference Proceedings INTEGRATED THIN FILM CAPACITOR ARRAYS

Liu,David, Kennedy,R.Moffatt, Korony,George, Makl,Steve, Mevissen,Jeffery, Hock,Joseph, Heistand,Robert,II.

IMAPS
3 Conference Proceedings THE CRACKING OF SOL-GEL FILMS DURING DRYING

Garino, Terry J.

Materials Research Society
9 Conference Proceedings Calculation of Hamaker Constants in Nonaqueous Fluid Media

Bell, Nelson, Dimos, Duane

Materials Research Society
4 Conference Proceedings RELATIONSHIPS BETWEEN FERROELECTRIC 90o DOMAIN FORMATION AND ELECTRICAL PROPERTIES OF CHEMICALLY PREPARED Pb(Zr, Ti)O3 THIN FILMS

Tuttle A. B., Garino J. T., Voigt A. J., Headley J. T., Dimos D., Eatough O. M.

Kluwer Academic Publishers
10 Conference Proceedings Calculation of hamaker constants in nonaqueous fluid media

Bell, Nelson, Dimos, Duane

MRS-Materials Research Society
5 Conference Proceedings Antiferroelectric Thin Films for Decoupling Capacitor and Microactuator Applications

Xu, Baomin, Pai, Neelesh G., Moses, Paul, Cross, L. Eric

MRS - Materials Research Society
11 Conference Proceedings THE CO-SINTERING OF LTCC MATERIALS

Garino, Terry J.

IMAPS
6 Conference Proceedings Low Impedance Thin Film Decoupling Capacitor for High Speed Digital Circuits

Konushi, S., Nagakari, S., Takafuji, J., Fukumaru, F., Nambu, S.

IMAPS
12 Conference Proceedings RF Magnetron Sputter-Deposition of La0.5Sr0.5CoO3//Pt Composite Electrodes for Pb(Zr,Ti)O3 Thin Film Capacitors

Raymond, M. V., Al-Shareef, H. N., Tuttle, B. A., Dimos, D., Evans, J. T.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12