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Dispersive white-light profilometer

Author(s):
Publication title:
New techniques and analysis in optical measurements : Interferometry '94, 16-20 May 1994, Warsaw, Poland
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2340
Pub. Year:
1994
Page(from):
375
Page(to):
381
Pages:
7
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819416735 [0819416738]
Language:
English
Call no.:
P63600/2340
Type:
Conference Proceedings

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