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Effect of oxygen and carbon on donor formation in CZ-silicon

Author(s):
S. Singh  
Publication title:
Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2337
Pub. Year:
1994
Page(from):
192
Page(to):
201
Pages:
10
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819416704 [0819416703]
Language:
English
Call no.:
P63600/2337
Type:
Conference Proceedings

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