Blank Cover Image

New approach to measuring oxide charge and mobile ion concentration

Author(s):
Publication title:
Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2337
Pub. date:
1994
Page(from):
154
Page(to):
164
Pages:
11
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819416704 [0819416703]
Language:
English
Call no.:
P63600/2337
Type:
Conference Proceedings

Similar Items:

Edelman, P., Lagowski, J., Savchouk, A., Hoff, A., Jastrzebski, L., Persson, E.

MRS - Materials Research Society

Edelman,P., Savchouk,A., Wilson,M., Jastrzebski,L., Lagowski,J.J., Nauka,K., Ma,S., Hoff,A.M., DeBusk,D.K.

SPIE-The International Society for Optical Engineering

Jastrzebski,L., Edelman,P., Lagowski,J.J., Hoff,A.M., Savchouk,A., Persson,E.

SPIE-The International Society for Optical Engineering

Sen, S., Hoff, A.M., Moradi, B., Lagowski, J., Jastrzebski, L.

Electrochemical Society

Stevie, F.A., Persson, E., DeBusk, D.K., Savchuk, A., Hoff, A.M., Edelman, P., Lagowski, J.

Electrochemical Society

Faifer, V., Edelman, P., Kontkiewicz, A., Lagowski, J., Hoff, A., Dyukov, V., Pravdivtsev, A., Kornienko, I.

Electrochemical Society

Stevie,F.A., Persson,E., DeBusk,D.K., Savchuk,A., Hoff,A.M., Edelman,P., Lagowski,J.

SPIE-The International Society for Optical Engineering

Edelman,. Piotr, Lagowski, Jacek, Jastrzebski, Lubek

Materials Research Society

Lagowski, J., Hoff, A., Jastrzebski, L., Edelman, P., Esry, T.

MRS - Materials Research Society

Lagowski, J., Faifer, V., Edelman, P.

Electrochemical Society

6 Conference Proceedings Whole-Wafer Plasma Damage Evaluation

Hoff, A.M., Lagowski, J., Nauka, N., Esry, T.C., Edelman, P., Jastrzebski, L.

Electrochemical Society

Wilson, M., Lagowski, J., Savtchou, A., Marinskiy, D., Jastrzebski, L., D'Amico, J.

MRS-Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12