New surface minority carrier lifetime measurement technique

New surface minority carrier lifetime measurement technique

Author(s):: W. Goldfarb
Publication title:: Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 2337
Pub. Year:: 1994
Page(from):: 129
Page(to):: 137
Pages:: 9
Pub. info.:: Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:: 0277786X
ISBN:: 9780819416704 [0819416703]
Language:: English
Call no.:: P63600/2337
Type:: Conference Proceedings

Details

TDL ID:	ZA00057540
Series ID:	PA00000029
Conf. info. (Name):	Symposium on optical characterization techniques for high-performance microelectronic device manufacturing
Conf. info. (Number):	1994
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1994.10.20
Note for article:	1994 Symposium on optical characterization techniques for high-performance microelectronic device manufacturing, October 20, 1994, Austin, TX, USA. 2337-16

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