Blank Cover Image

Practical, nondestructive method to profile near-surface and subsurface defects in semiconductor wafers

Author(s):
Publication title:
Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2337
Pub. Year:
1994
Page(from):
117
Page(to):
128
Pages:
12
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819416704 [0819416703]
Language:
English
Call no.:
P63600/2337
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Contact potential difference methods for full wafer characterization of Si/Si02 interface defects induced by plasma processing (Invited Paper)

Edelman,P., Savchouk,A., Wilson,M., Jastrzebski,L., Lagowski,J.J., Nauka,K., Ma,S., Hoff,A.M., DeBusk,D.K.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Nondestructive Profile Measurements of Annealed Shallow Implants

Borden, P., Nijmeijer, R., Lingel, K.

MRS - Materials Research Society
2 Conference Proceedings Semiconductor wafer defect detection using digital holography

Schulze, M.A., Hunt, M.A., Voelkl, E., Hickson, J.D., Usry, W.R., Smith, R.G., Bryant, R., Thomas, C.E., Jr.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Application of nondestructive optical techniques in the detection of surface and subsurface defects in sapphire

I. A. Akwani, D. L. Hibbard, K. T. Jacoby

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Direct to digital holography for semiconductor wafer defect detection and review(Invited Paper)

Thomas, C.E., Jr., Bahm, T.M., Baylor, L.R., Bingham, P.R., Burns, S.W., Chidley, M.D., Dai, X.L., Delahanty, R.J., …

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Multifractal point defect clusters in subsurface damaged layer of semiconductor wafers

Fedtchouk,A.P., Rudenko,R.A., Fedtchouk,A.A.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Small signal AC-surface photovoltage technique for non-contact monitoring of near surface doping and recombination-generation in the depletion layer

Marinskiy, D., Lagowski, J., Wilson, M., Savtchouk, A., Jastrzebski, L., DeBusk, D.

MRS-Materials Research Society
10 Conference Proceedings Measuring Diffusion Lengths in Epitaxial Silicon by Surface Photovoltage

Lowell, John, Wenner, Valerie, Debusk, Damon

MRS - Materials Research Society
5 Conference Proceedings HEAVY METAL AND ORGANIC CLEANING EFFICIENCY OPTIMIZATION AND MONITORING FOR REAL-TIME, IN-LINE PROCESS CONTROL BY SURFACE PHOTOVOLTAGE

Jastrzebski, L., Henley, W., DeBusk, D., Haddad, N., Lowell, J., Wenner, V., Nauka, K., Persson, E.

Electrochemical Society
11 Conference Proceedings Real-time on-wafer evaluation of contaminant-induced defects from resist processing

Lowell,J.K., Ackmann,P.W., Brown,S.E., Sherry,J., Hossain,T.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings REDUCTION OF SURFACE ROUGHENING AND SUBSURFACE DEFECTS IN H-PLASMA CLEANING OF Si (100)

Schneider, T.P., Montgomery, J.S., Ying, H., Barnak, J.P., Chen, Y.L., Maher, D.M., Nemanich, R.J.

Electrochemical Society
12 Conference Proceedings Nondestructive method for visualization of free carrier accumulation in standard semiconductors wafers

O.V. Astafiev, V.P. Kalinushkin, V.A. Yuryev

Society of Photo-optical Instrumentation Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12