Characterization of polycrystalline silicon grain boundary structures by optical second harmonic generation

Characterization of polycrystalline silicon grain boundary structures by optical second harmonic generation

Author(s):

Publication title:

Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2337

Pub. Year:

1994

Page(from):

86

Page(to):

92

Pages:

7

Pub. info.:

Bellingham, WA: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819416704 [0819416703]

Language:

English

Call no.:

P63600/2337

Type:

Conference Proceedings

Details

TDL ID:	ZA00057540
Series ID:	PA00000029
Conf. info. (Name):	Symposium on optical characterization techniques for high-performance microelectronic device manufacturing
Conf. info. (Number):	1994
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1994.10.20
Note for article:	1994 Symposium on optical characterization techniques for high-performance microelectronic device manufacturing, October 20, 1994, Austin, TX, USA. 2337-11

Similar Items:

1 Conference Proceedings Optical Second Harmonic Generation Method for Silicon Material Monitoring and Characterization During Ion Implantation and Annealing Processes Gu, Y., Chou, Y. C., Vu, T., Yen, K., Lin, Y. S., Li, G. P. MRS - Materials Research Society	7 Conference Proceedings Optical second harmonic generation microscopy under circularly polarized beam Xu, P., Kable, E., Cox, G. C. SPIE - The International Society of Optical Engineering
2 Conference Proceedings Investigation of stress/strain of silicon on insulator using optical second harmonic generation method Y. Gu, C. Hu, L. Cheng, D.Y. Zang, G.-P. Li Society of Photo-optical Instrumentation Engineers	8 Conference Proceedings Effects of Y and Zr Dopants on Grain Boundary Structure in Creep Resistant Polycrystalline Alumina Cargill, G. S., III, Wang, C.M., Rickman, J.M., Chan, H.M., Harmer, M.P. Materials Research Society
3 Conference Proceedings Modulated pattern in second-harmonic generation Li, C.P., Shen, K. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Three-dimensional tooth imaging using multiphoton and second harmonic generation microscopy M.-H. Chen, W.-L. Chen, Y. Sun, P. T. Fwu, M.-G. Lin, C.-Y. Dong SPIE - The International Society of Optical Engineering
4 Conference Proceedings Probing the structure of multilayer molecular adsorbates on metal by second harmonic generation T. Sjodin, C.M. Li, H.-L. Dai Society of Photo-optical Instrumentation Engineers	10 Conference Proceedings Second harmonic generation in collagen Reiser, K. M., Stoller, P., Celliers, P., Rubenchik, A., Bratton, C., Yankelevich, D. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Nonlinear optical method for the investigation of spectral properties of biomolecular complexes: second harmonic generation in ordered structures of … O.A. Aktsipetrov, A.A. Fedyanin, T.V. Murzina, C.P. Borisevich, A.A. Kononenko Society of Photo-optical Instrumentation Engineers	11 Conference Proceedings TEM Studies of Grain Boundary Structure in a Cast Polycrystalline Silicon Kuchiwaki, I., Hirabayashi, T., Fukushima, H. Trans Tech Publications
6 Conference Proceedings Grain boundary structures and properties in polycrystalline silicon Tsuo, Y.S., Milstein, J.B., Surek, T. North-Holland	12 Conference Proceedings Second-harmonic generation investigation of collagen thermal denaturation W. Chen, Y. Sun, S. Lin, S. Jee, Y. Chen, L. Lin, P. T. C. So, C. Dong SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12