Scatterometric sensor for lithography
- Author(s):
- Publication title:
- Manufacturing process control for microelectronic devices and circuits : 20-21 October 1994, Austin, Texas
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2336
- Pub. Year:
- 1994
- Page(from):
- 37
- Page(to):
- 49
- Pages:
- 13
- Pub. info.:
- Bellingham, WA: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819416698 [081941669X]
- Language:
- English
- Call no.:
- P63600/2336
- Type:
- Conference Proceedings
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