Blank Cover Image

Advanced statistical process control of a chemical vapor tungsten deposition process on an Applied Materials Centura reactor

Author(s):
Publication title:
Manufacturing process control for microelectronic devices and circuits : 20-21 October 1994, Austin, Texas
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2336
Pub. date:
1994
Page(from):
25
Page(to):
36
Pages:
12
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819416698 [081941669X]
Language:
English
Call no.:
P63600/2336
Type:
Conference Proceedings

Similar Items:

Saxena,S., Burch,R., Mozumder,P.K., Vasanth,K., Rao,S., Davis,J., Fernando,C.

SPIE-The International Society for Optical Engineering

Zee, R., Xiao, Z., Gale, H.S., Chin, B.A., Begg, L.L.

Electrochemical Society

Segal, A.S., Kondratyev, A.V., Galyskov, A.O., Kampov, S.Yu., Makarov, Yu.N., Sieberm, W., Siarek, P., Lowmy, S.

Electrochemical Society

Hossain,F.R., Ambadi,S., Winer,R., Kitt,K., Garcia,C., Pearse,J.

SPIE - The International Society for Optical Engineering

Vasanth, K., Apte, P., Davis, J., Saxena, S., Burch, R., Rao, S., Mozumder, P. K.

MRS - Materials Research Society

Moinpour, Mansour, Bohannan, K., Shenasa, M., Sharif, A., Guzzo, G., Brestovansky, D.F., Markle, R.J., Wilkes, R.

Materials Research Society

Vasanth, K., Apte, P., Davis, J., Saxena, S., Burch, R., Rao, S., Mozumder, P. K.

MRS - Materials Research Society

Mavoori, J., Singh, R., Sharangpani, R., Gong, C., Poole, K. F., Singh, R. K., Natarajan, R.

MRS - Materials Research Society

Kristof, J., Song, L., Tsakalis, K., Cale, T.S.

Electrochemical Society

Agarwal, P., Bielmann, M., Lolt, D., Mahajan, U., Mischler, S., Rosset, E., Singh, R. K.

Materials Research Society

Smith, T.H., Boning, D.S., Stefani, J., Butler, S.W.

Electrochemical Society

Mouroux, A., Palmans, R., Keinonen, J., Zhang, S.-L., Maex, K., Petersson, C. S.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12