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Fabrication of waveguide grating coupler with double corrugation by ion-beam etching technology

Author(s):
Publication title:
Second International Conference on Optoelectronic Science and Engineering '94 : 15-18 August 1994, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2321
Pub. Year:
1994
Page(from):
432
Page(to):
434
Pages:
3
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819416520 [0819416525]
Language:
English
Call no.:
P63600/2321
Type:
Conference Proceedings

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