Blank Cover Image

(382d) Silicon-Containing Block Copolymers for Sub-20 Nm Pitch Patterning

Author(s):
Publication title:
Materials Engineering and Sciences Division 2013 : Core Programming Area at the 2013 AIChE Annual Meeting: Global Challenges for Engineering a Sustainable Future : San Francisco, California, USA, 3-8 November 2013
Title of ser.:
AIChE Conference Proceedings
Ser. no.:
2013
Pub. date:
2013
Page(from):
462
Page(to):
462
Pages:
1
Pub. info.:
New York: American Institute of Chemical Engineers
ISBN:
9781634390460 [1634390466]
Language:
English
Call no.:
A08000/2013 [CD-ROM]
Type:
Conference Proceedings

Similar Items:

Julia D. Cushen, Lei Wan, Ricardo Ruiz, C. Grant Willson, Christopher J. Ellison

American Institute of Chemical Engineers

H. Kim, J. Cheng, C. Rettner, O. Park, R. Miller, M. Hart, L. Sundstrom, Y. Zhang

SPIE - The International Society of Optical Engineering

Christopher J. Ellison, Dustin W. Janes, Christopher J. Thode, C. Grant Willson, Paul F. Nealey

American Institute of Chemical Engineers

Christopher J. Ellison

American Institute of Chemical Engineers

Julia D. Cushen, Issei Otsuka, Sami Halila, Sébastien Fort, Redouane Borsali

American Institute of Chemical Engineers

Hatakeyama, J., Takeda, T., Kinsho, T., Kawai, Y., Ishihara, T.

SPIE-The International Society for Optical Engineering

Julia D. Cushen, Issei Otsuka, Sami Halila, Sébastien Fort, Redouane Borsali

American Institute of Chemical Engineers

Gabor, Allen H., Ober, Christopher K.

American Chemical Society

Anthony Engler, Austin Lane, C. Grant Willson

American Institute of Chemical Engineers

Hong, Wan-Shick, Delgado, J. C., Ruiz, O., Perez-Mendez, V.

MRS - Materials Research Society

Jeffrey Self, Michael Maher, C. Grant Willson

American Institute of Chemical Engineers

Dustin W. Janes, Bradley D. McCoy, Takejiro Inoue, Ishita Madan, Christopher J. Thode

American Institute of Chemical Engineers

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12