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(382d) Silicon-Containing Block Copolymers for Sub-20 Nm Pitch Patterning

Author(s):
Publication title:
Engineering Sciences and Fundamentals 2013 : Core Programming Area at the 2013 AIChE Annual Meeting: Global Challenges for Engineering a Sustainable Future : San Francisco, California, USA, 3-8 November 2013
Title of ser.:
AIChE Conference Proceedings
Ser. no.:
2013
Pub. Year:
2013
Pt.:
2
Page(from):
608
Page(to):
608
Pages:
1
Pub. info.:
New York: American Institute of Chemical Engineers
ISBN:
9781634390392 [1634390393]
Language:
English
Call no.:
A08000/2013 [CD-ROM]
Type:
Conference Proceedings

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