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(530b) Hot Wire Assisted Chemical Vapor Deposition (HWCVD) of Niobium Nitride Thin Films

Author(s):
Publication title:
2011 AIChE annual meeting, October 16-21, Minneapolis Convention Center, Minneapolis, MN : conference proceedings : Non-topical conferences
Title of ser.:
AIChE Conference Proceedings
Ser. no.:
P-267
Pub. Year:
2011
Pt.:
Materials Engineering & Sciences Division
Pub. info.:
New York: American Institute of Chemical Engineers
ISBN:
9780816910700 [0816910707]
Language:
English
Call no.:
A08000/2011 [CD-ROM]
Type:
Conference Proceedings

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