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(92c) Chemical Vapor Deposition of WNxCy for Diffusion Barrier Application Using a Tungsten Diphenylhydrazido Complex

Author(s):
Publication title:
Conference proceedings : 2009 AIChE annual meeting, Nashvikke, TN, November 8-13 : 09 AIChE annual meeting, Nashville, TN ; Non-topical conferences
Title of ser.:
AIChE Conference Proceedings
Ser. no.:
P-262
Pub. Year:
2009
Pt.:
8
Page(from):
156433
Pub. info.:
New York: American Institute of Chemical Engineers
ISBN:
9780816910586 [0816910588]
Language:
English
Call no.:
A08000/2009 [CD-ROM]
Type:
Conference Proceedings

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