In-situ Measurement and Control for Photoresist Processing in Microlithography
- Author(s):
- Publication title:
- 2004 AIChE annual meeting, Austin Covention Center, Austin, Texas, November 7-12 : conference proceedings
- Title of ser.:
- AIChE Conference Proceedings
- Ser. no.:
- P-213
- Pub. Year:
- 2004
- Page(from):
- 411b
- Pages:
- 17
- Pub. info.:
- New York: American Institute of Chemical Engineers
- ISBN:
- 9780816909650 [0816909652]
- Language:
- English
- Call no.:
- A08000/2004 [CD-ROM]
- Type:
- Conference Proceedings
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