Iterative Feedback Tuning Control of Photoresist Film Thickness Uniformity

Iterative Feedback Tuning Control of Photoresist Film Thickness Uniformity

Author(s):

Publication title:

03 AIChE annlual meeting, November 16-21, San Francisco, California, AIChE 2003 annual meeting conference proceedings

Title of ser.:

AIChE Conference Proceedings

Ser. no.:

P-201

Pub. Year:

2003

Page(from):

428a

Pages:

14

Pub. info.:

New York: American Institute of Chemical Engineers

ISBN:

9780816909414 [0816909415]

Language:

English

Call no.:

A08000/2003 [CD-ROM]

Type:

Conference Proceedings

Details

TDL ID:	ZA00061142
Series ID:	PA00000008
Conf. info. (Name):	AIChE Annual Meeting
Conf. info. (Number):	2003
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2003.11.16-2003.11.21
Note for article:	2003 Annual Meeting, San Francisco, California November 16-21, 2003

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