Blank Cover Image

Analytical Evaluation of Thermally Oxidized and Deposited Dielectric in NMOS-PMOS devices

Author(s):
Publication title:
Silicon Carbide and Related Materials 2015 : [ICSCRM 2015] : selected, peer reviewed papers from the 16th International Conference on Silicon Carbide and Related Materials, October 4-9, 2015, Giardini Naxos, Italy
Title of ser.:
Materials science forum
Ser. no.:
858
Pub. Year:
2016
Page(from):
631
Page(to):
634
Pages:
4
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9783035710427 [3035710422]
Language:
English
Call no.:
M23650 [v.858]
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Electrical Stability Impact of Gate Oxide in Channel Implanted SiC NMOS and PMOS Transistors

M.I. Idris, M.H. Weng, H.K. Chan, A.E. Murphy, D.A. Smith, R.A.R. Young, E.P. Ramsay, D.T. Clark, N.G. Wright, A.B. …

Trans Tech Publications
7 Conference Proceedings RTP Process to Reduce NMOS to PMOS Isolation Step height Delta

Khoueir, A., Khoury, M., Zagrehelny, A., Sen, I., Fulford, J., Amzen, D.

Electrochemical Society
2 Conference Proceedings Influence of Phosphorous Auto-Doping on the Characteristics of SiO2/SiC Gate Dielectrics

M.H. Weng, A.E. Murphy, C. Ryan, B.J.D. Furnival, D.A. Smith

Trans Tech Publications
8 Conference Proceedings Effects of Pre-Treatment Durations on Properties of Black Tilapia (Oreochromis mossambicus) Skin Gelatin

K. Sockalingam, H. Nelson, M.I. Idris, H.Z. Abdullah

Trans Tech Publications
3 Conference Proceedings Investigation of VT Shift Mechanism of High-K Dielectrics caused by Lanthanum Capping for NMOS and Tantalum Capping for PMOS Devices

B. Lee, D. Lichtenwalner, M. Agustin, R. Arghavani, X. Tang

Electrochemical Society
9 Conference Proceedings Investigation of Surface Properties of Titanium Treated with Combined Alkali and Sodium Removal Treatments

K.J. Tan, M.I. Idris, H.Z. Abdullah

Trans Tech Publications
4 Conference Proceedings Low Frequency Noise Analysis of Monolithically Fabricated 4H-SiC CMOS Field Effect Transistors

L.C. Martin, H.K. Chan, D. Clark, E.P. Ramsay, A.E. Murphy

Trans Tech Publications
10 Conference Proceedings Plasma Etching for the Application to Low-K Dielectrics Devices

J.W. Lee, H.W. Kim, J.W. Han, M.S. Kim, B.D. Yoo, M.H. Kim, C.H. Lee, C.H. Lim, S.K. Hwang, C. Lee, D.J. Chung, S.G. …

Trans Tech Publications
5 Conference Proceedings Modeling the Dependence of the Gate Current on Ge Content in Ultrathin Gate Dielectric PMOS Devices With Poly-Si1-xGex Gate Material

Shanware, A., Massoud, H. Z., Acker, A., Li, V. Z. Q., Mirabedini, M. R., Henson, K., Hauser, J. R., Wortman, J. J.

MRS - Materials Research Society
11 Conference Proceedings Electrical Properties of Metal-Oxide-Semiconductor (MOS) Structures on 4H-SiC(0001) Formed by Oxidizing Pre-Deposited SixNy

J.H. Moon, D.H. Kim, H.K. Song, J.H. Yim, W. Bahng, N.K. Kim, K.S. Seo, H.J. Kim

Trans Tech Publications
6 Conference Proceedings Electrical Properties of Atomic-Layer-Deposited La2O3/Thermal-Nitrided SiO2 Stacking Dielectric on 4H-SiC(0001)

J.H. Moon, K.Y. Cheong, D.I. Eom, H.K. Song, J.H. Yim, J.H. Lee, H.J. Na, W. Bahng, N.K. Kim, H.J. Kim

Trans Tech Publications
12 Conference Proceedings LEDS Based on Oxidized Porous Polysilicon on a Transparent Substrate

Striemer, C. C., Chan, S., Lopez, H. A., Hirschman, K. D., Koyama, H., Zhu, Q., Tsybeskov, L., Fauchet, P. M., …

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12