High Temperature Variable Range Hopping in Heavy Al Implanted 4H-SiC

High Temperature Variable Range Hopping in Heavy Al Implanted 4H-SiC

Author(s):

Publication title:

Silicon Carbide and Related Materials 2015 : [ICSCRM 2015] : selected, peer reviewed papers from the 16th International Conference on Silicon Carbide and Related Materials, October 4-9, 2015, Giardini Naxos, Italy

Title of ser.:

Materials science forum

Ser. no.:

858

Pub. Year:

2016

Page(from):

283

Page(to):

286

Pages:

4

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9783035710427 [3035710422]

Language:

English

Call no.:

M23650 [v.858]

Type:

Conference Proceedings

Details

TDL ID:	ZA00055306
Series ID:	PA00000012
Conf. info. (Name):	International Conference on Silicon Carbide and Related Materials - ICSCRM 2015
Conf. info. (Number):	16th
Conf. info. (Venue):	Giardini Naxos, Italy
Conf. info. (Date):	2015.10.04-2015.10.09
Note for article:	16th International Conference on Silicon Carbide and Related Materials : ICSCRM 2015, October 4-9, 2015, Giardini Naxos, Italy

Similar Items:

1 Conference Proceedings About the Hole Transport Analysis in Heavy Doped p-Type 4H-SiC(Al) A. Parisini, R. Nipoti Trans Tech Publications	7 Conference Proceedings Structural Characterization of Alloyed Al/Ti and Ti Contacts on SiC Parisini, A., Poggi, A., Nipoti, R. Trans Tech Publications
2 Conference Proceedings Microwave Annealing of Al⁺ Implanted 4H-SiC: Towards Device Fabrication A. Nath, A. Parisini, Y.L. Tian, M.V. Rao, R. Nipoti Trans Tech Publications	8 Conference Proceedings High Dose Al⁺ Implanted and Microwave Annealed 4H-SiC R. Nipoti, A. Nath, M.V. Rao, A. Hallén, F. Mancarella Trans Tech Publications
3 Conference Proceedings Low-Temperature Thermal Oxidation of Ion-Amorphized 6H-SiC Nipoti, R., Parisini, A., Poggi, A. Trans Tech Publications	9 Conference Proceedings Forward Current of Al⁺ Implanted 4H-SiC Diodes: A Study on Periphery and Area Components M. Puzzanghera, R. Nipoti Trans Tech Publications
4 Conference Proceedings Low-Temperature Thermal Oxidation of Ion-Amorphized 6H-SiC Nipoti, R., Parisini, A., Poggi, A. Trans Tech Publications	10 Conference Proceedings Controlling the Carbon Vacancy Concentration in 4H-SiC Subjected to High Temperature Treatment H.M. Ayedh, R. Nipoti, A. Hallén, B.G. Svensson Trans Tech Publications
5 Conference Proceedings Al⁺ Implanted 4H-SiC: Improved Electrical Activation and Ohmic Contacts R. Nipoti, A. Hallén, A. Parisini, F. Moscatelli, S. Vantaggio Trans Tech Publications	11 Conference Proceedings Formation of D-Center in p-Type 4H-SiC Epi-Layers during High Temperature Treatments H.M. Ayedh, N. Iwamoto, R. Nipoti, A. Hallén, B.G. Svensson Trans Tech Publications
6 Conference Proceedings 1950° C Annealing of Al⁺ Implanted 4H-SiC: Sheet Resistance Dependence on the Annealing Time R. Nipoti, A. Parisini, S. Vantaggio, G. Alfieri, A. Carnera Trans Tech Publications	12 Conference Proceedings A Comparative Study of High-Temperature Aluminum Post-Implantation Annealing in 6H- and 4H-SiC, Non-Uniform Temperature Effects Lazar, M., Raynaud, C., Planson, D., Locatelli, M.-L., Isoird, K., Ottaviani, L., Chante, J.P., Nipoti, R., Poggi, A., … Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12