The Influence of C2H2 Flow Rate on the Composition, Structural and Properties of the Ni/α-C:H Films Deposited by FCVA

The Influence of C₂H₂ Flow Rate on the Composition, Structural and Properties of the Ni/α-C:H Films Deposited by FCVA

Author(s):

Publication title:

Functional Materials Research : selected, peer reviewed papers from the China Functional Material Technology and Industry Forum CFMTIF 2015, October 30th - Novemnber 1th, 2015

Title of ser.:

Materials science forum

Ser. no.:

852

Pub. Year:

2016

Pt.:

2

Page(from):

1132

Page(to):

1139

Pages:

8

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9783038357551 [3038357553]

Language:

English

Call no.:

M23650 [v.852]

Type:

Conference Proceedings

Details

TDL ID:	ZA00055300
Series ID:	PA00000012
Conf. info. (Name):	China Functional Material Technology and Industry Forum - CFMTIF 2015
Conf. info. (Number):	2015
Conf. info. (Venue):	China
Conf. info. (Date):	2015.10.30-2015.11.01
Note for article:	China Functional Material Technology and Industry Forum CFMTIF 2015, October 30th - Novemnber 1th, 2015

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