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Influence of Deposition Time on Bonding and Morphology of Amorphous Carbon Nitride Thin Films

Author(s):
Publication title:
Main Tendencies in Applied Materials Science : Selected, peer reviewed papers from the 28th Regional Conference on Solid State Science and Technology 2014 (RCSSST 2014), November 25-27, 2014, Cameron Highlands, Pahang, Malaysia
Title of ser.:
Materials science forum
Ser. no.:
846
Pub. date:
2016
Page(from):
657
Page(to):
664
Pages:
8
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9783038357520 [3038357529]
Language:
English
Call no.:
M23650 [v.846]
Type:
Conference Proceedings

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