Optimization of Silicon-Based Fabrication Process Modeling for Optical Modulator

Optimization of Silicon-Based Fabrication Process Modeling for Optical Modulator

Author(s):

Publication title:

Main Tendencies in Applied Materials Science : Selected, peer reviewed papers from the 28th Regional Conference on Solid State Science and Technology 2014 (RCSSST 2014), November 25-27, 2014, Cameron Highlands, Pahang, Malaysia

Title of ser.:

Materials science forum

Ser. no.:

846

Pub. Year:

2016

Page(from):

230

Page(to):

236

Pages:

7

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9783038357520 [3038357529]

Language:

English

Call no.:

M23650 [v.846]

Type:

Conference Proceedings

Details

TDL ID:	ZA00054303
Series ID:	PA00000012
Conf. info. (Name):	Regional Conference on Solid State Science and Technology (RCSSST 2014)
Conf. info. (Number):	28th
Conf. info. (Venue):	Cameron Highlands, Pahang, Malaysia
Conf. info. (Date):	2014.11.25-2014.11.27
Note for article:	28th Regional Conference on Solid State Science and Technology 2014 (RCSSST 2014), November 25-27, 2014, Cameron Highlands, Pahang, Malaysia

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