High-Temperature Operation of Electrostatically-Excited Single-Crystalline 4H-SiC Microcantilever Resonators

High-Temperature Operation of Electrostatically-Excited Single-Crystalline 4H-SiC Microcantilever Resonators

Author(s):

Publication title:

Silicon Carbide and Related Materials 2014 : Selected peer reviewed papers from the European Conference on Silicon Carbide & Related Materials (ECSCRM 2014), September 21-25, 2014, Grenoble, France

Title of ser.:

Materials science forum

Ser. no.:

821-823

Pub. Year:

2015

Page(from):

914

Page(to):

918

Pages:

5

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00054285
Series ID:	PA00000012
Conf. info. (Name):	European Conference on Silicon Carbide & Related Materials (ECSCRM 2014)
Conf. info. (Number):	2014
Conf. info. (Venue):	Grenoble, France
Conf. info. (Date):	2014.09.21-2014.09.25
Note for article:	European Conference on Silicon Carbide & Related Materials (ECSCRM 2014), September 21-25, 2014, Grenoble, France

Similar Items:

1 Conference Proceedings Fabrication of Electrostatically Actuated 4H-SiC Microcantilever Resonators by Using n/p/n Epitaxial Structures and Doping-Selective Electrochemical Etching K. Sato, K. Adachi, H. Okamoto, H. Yamaguchi, T. Kimoto Trans Tech Publications	7 Conference Proceedings Origin of Surface Morphological Defects in 4H-SiC Homoepitaxial Films Okada, T., Okamoto, K., Ochi, K., Higashimine, K., Kimoto, T. Trans Tech Publications
2 Conference Proceedings Trials of Solution Growth of Dislocation-Free 4H-SiC Bulk Crystals K. Danno, S. Yamaguchi, H. Kimoto, K. Sato, T. Bessho Trans Tech Publications	8 Conference Proceedings Fast Epitaxial Growth of High-Quality 4H-SiC by Vertical Hot-Wall CVD Fujihira, K., Kimoto, T., Matsunami, H. Trans Tech Publications
3 Conference Proceedings High Temperature Deep Level Transient Spectroscopy Investigations of n-Type 4H-SiC Epitaxial Layers Schoner, A., Fujihira, K., Kimoto, T., Matsunami, H. Trans Tech Publications	9 Conference Proceedings Anisotropic etching of single crystalline SiC using molten KOH for SiC bulk micromachining [6109-18] Fukunaga, K., Suda, J., Kimoto, T. SPIE - The International Society of Optical Engineering
4 Conference Proceedings Flat Surface after High-Temperature Annealing for Phosphorus-Ion Implanted 4H-SiC(0001) using Graphite Cap Negoro, Y., Katsumoto, K., Kimoto, T., Matsunami, H. Trans Tech Publications	10 Conference Proceedings On the Formation of Intrinsic Defects in 4H-SiC by High Temperature Annealing Steps B. Zippelius, J. Suda, T. Kimoto Trans Tech Publications
5 Conference Proceedings Electrical Behavior of Implanted Aluminum and Boron near Tail Region in 4H-SiC after High-Temperature Annealing Negoro, Y., Kimoto, T., Matsunami, H. Trans Tech Publications	11 Conference Proceedings Temperature Dependence of Impact Ionization Coefficients in 4H-SiC H. Niwa, J. Suda, T. Kimoto Trans Tech Publications
6 Conference Proceedings High-Speed Growth of High-Purity Epitaxial Layers with Specular Surface on 4H-SiC(000-1) Face Danno, K., Kimoto, T., Matsunami, H. Trans Tech Publications	12 Conference Proceedings Fabrication of 4H-SiC Double-Epitaxial MOSFETs Harada, S., Okamoto, M., Yatsuo, T., Adachi, K., Suzuki, K., Suzuki, S., Fukuda, K., Arai, K. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12