Influence of Substrate Temperature on the Al and Zr Co-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering

Influence of Substrate Temperature on the Al and Zr Co-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering

Author(s):

Publication title:

Energy and Environmental Materials II : Selected, peer reviewed papers from the Chinese Materials Congress 2014 (CMC 2014), July 4-7, 2014, Chengdu, China

Title of ser.:

Materials science forum

Ser. no.:

814

Pub. Year:

2015

Page(from):

601

Page(to):

606

Pages:

6

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00054278
Series ID:	PA00000012
Conf. info. (Name):	Chinese Materials Congress 2014 (CMC 2014)
Conf. info. (Number):	2014
Conf. info. (Venue):	Chengdu, China
Conf. info. (Date):	2014.07.04-2014.07.07
Note for article:	Chinese Materials Congress 2014 (CMC 2014), July 4-7, 2014, Chengdu, China

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