Strain Evaluation and Fracture Properties of Hetero-Epitaxial Single Crystal 3C-SiC Squared Membrane

Strain Evaluation and Fracture Properties of Hetero-Epitaxial Single Crystal 3C-SiC Squared Membrane

Author(s):

Publication title:

HeteroSiC & WASMPE 2013 : Selected, peer reviewed papers from the 5th Edition of International Workshop on Silicon Carbide Hetero-Epitaxy and Workshop on Advanced Semiconductor Materials and Devices for Power Electronics Applications (HeteroSiC-WASMPE 2013), June 17-19, 2013, Nice, France

Title of ser.:

Materials science forum

Ser. no.:

806

Pub. Year:

2015

Page(from):

11

Page(to):

14

Pages:

4

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00054271
Series ID:	PA00000012
Conf. info. (Name):	Edition of International Workshop on Silicon Carbide Hetero-Epitaxy and Workshop on Advanced Semiconductor Materials and Devices for Power Electronics Applications (HeteroSiC-WASMPE 2013)
Conf. info. (Number):	5th
Conf. info. (Venue):	Nice, France
Conf. info. (Date):	2013.06.17-2013.06.19
Note for article:	5th Edition of International Workshop on Silicon Carbide Hetero-Epitaxy and Workshop on Advanced Semiconductor Materials and Devices for Power Electronics Applications (HeteroSiC-WASMPE 2013), June 17-19, 2013, Nice, France

Similar Items:

1 Conference Proceedings Evaluation of Mechanical and Optical Properties of Hetero-Epitaxial Single Crystal 3C-SiC Squared-Membrane R. Anzalone, G. D'Arrigo, M. Camarda, N. Piluso, F. La Via Trans Tech Publications	7 Conference Proceedings Post-Growth Process Effect on Hetero-Epitaxial 3C-SiC Wafer Bow and Residual Stress R. Anzalone, M. Camarda, A. Auditore, N. Piluso, A. Severino Trans Tech Publications
2 Conference Proceedings Mechanical Proprieties and Residual Stress Evaluation on Heteroepitaxial 3C-SiC/Si for MEMS Application R. Anzalone, G. D'Arrigo, M. Camarda, N. Piluso, A. Severino Trans Tech Publications	8 Conference Proceedings Raman Stress Characterization of Hetero-Epitaxial 3C-SiC Free Standing Structures N. Piluso, M. Camarda, R. Anzalone, A. Severino, A. La Magna Trans Tech Publications
3 Conference Proceedings Advanced Stress Analysis by Micro-Structures Realization on High Quality Hetero-Epitaxial 3C-SiC for MEMS Application R. Anzalone, M. Camarda, G. D'Arrigo, C. Locke, A. Canino Trans Tech Publications	9 Conference Proceedings Hetero-Epitaxial Single Crystal 3C-SiC Opto-Mechanical Pressure Sensor A. Roncaglia, R. Anzalone, L. Belsito, F. Mancarella, M. Camarda Trans Tech Publications
4 Conference Proceedings Stress Evaluation on Hetero-Epitaxial 3C-SiC Film on (100) Si Substrates R. Anzalone, M. Camarda, C. Locke, J. Carballo, N. Piluso Trans Tech Publications	10 Conference Proceedings Strain Field Analysis of 3C-SiC Free-Standing Microstructures by Micro-Raman and Theoretical Modelling M. Camarda, N. Piluso, R. Anzalone, A. La Magna, F. La Via Trans Tech Publications
5 Conference Proceedings Micro-Raman Analysis of a Micromachined 3C-SiC Cantilever N. Piluso, R. Anzalone, M. Camarda, A. Severino, G. D'Arrigo Trans Tech Publications	11 Conference Proceedings Electrical Properties Evaluation on High Quality Hetero-Epitaxial 3C-SiC(001) for MOSFET Applications R. Anzalone, S. Privitera, A. Alberti, N. Piluso, P. Fiorenza Trans Tech Publications
6 Conference Proceedings Curvature Evaluation of Si/3C-SiC/Si Hetero-Structure Grown by Chemical Vapor Deposition R. Anzalone, M. Camarda, A. Severino, N. Piluso, F. La Via Trans Tech Publications	12 Conference Proceedings Structural Characterization of Heteroepitaxial 3C-SiC A. Severino, R. Anzalone, M. Camarda, N. Piluso, F. La Via Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12