Effects of Substrate Temperature on the Electrical and the Optical Properties of N-Type ZnO/P-Type 4H-SiC

Effects of Substrate Temperature on the Electrical and the Optical Properties of N-Type ZnO/P-Type 4H-SiC

Author(s):

Publication title:

Silicon carbide and related materials 2011 : selected, peer reviewed papers from the 14th International Conference on Silicon Carbide and Related Materials 2011 (ICSCRM 2011), September 11-16, 2011, Cleveland, Ohio, USA

Title of ser.:

Materials science forum

Ser. no.:

717-720

Pub. Year:

2012

Pt.:

2

Page(from):

1327

Page(to):

1330

Pages:

4

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00054207
Series ID:	PA00000012
Conf. info. (Name):	International Conference on Silicon Carbide and Related Materials 2011 (ICSCRM 2011)
Conf. info. (Number):	14th
Conf. info. (Venue):	Cleveland, Ohio, USA
Conf. info. (Date):	2011.09.11-2011.09.16
Note for article:	14th International Conference on Silicon Carbide and Related Materials 2011 (ICSCRM 2011), September 11-16, 2011, Cleveland, Ohio, USA

Similar Items:

1 Conference Proceedings GaZnO as a Transparent Electrode to Silicon Carbide J.H. Lee, J.H. Kim, K.M. Do, B.M. Moon, S.J. Joo Trans Tech Publications	7 Conference Proceedings Effects of Post-Annealing on the Electrical and Optical Properties of ZnO Thin Films Grown on Al2O3 Substrates by Atomic Layer Epitaxy C.M. Lee, Y.J. Cho, H.J. Kim, W.W. Lee, H.W. Kim, C.K. Hwangbo, J.G. Lee Trans Tech Publications
2 Conference Proceedings Titanium-Based Ohmic Contact on p-Type 4H-SiC Jung, K.H., Cho, N.I., Lee, J.H., Yang, S.J., Kim, C.K., Lee, B.-T., Rim, K.H., Kim, N.-K., Kim, E.-D. Trans Tech Publications	8 Conference Proceedings 4H-SiC Planar MESFETs on High-Purity Semi-Insulating Substrates J.H. Yim, H.K. Song, J.H. Moon, H.S. Seo, J.H. Lee, H.J. Na, J.B. Lee, H.J. Kim Trans Tech Publications
3 Conference Proceedings Titanium-Based Ohmic Contact on p-Type 4H-SiC Jung, K.H., Cho, N.I., Lee, J.H., Yang, S.J., Kim, C.K., Lee, B.-T., Rim, K.H., Kim, N.-K., Kim, E.-D. Trans Tech Publications	9 Conference Proceedings Effects of Interfacial Reactions on Electrical Properties of Ni Ohmic Contacts on n-Type 4H-SiC Han, S. Y., Kim, N.-K., Kim, E.-D., Lee, J.-L. Trans Tech Publications
4 Conference Proceedings Electrical Properties of Metal-Oxide-Semiconductor (MOS) Structures on 4H-SiC(0001) Formed by Oxidizing Pre-Deposited SixNy J.H. Moon, D.H. Kim, H.K. Song, J.H. Yim, W. Bahng, N.K. Kim, K.S. Seo, H.J. Kim Trans Tech Publications	10 Conference Proceedings Electrical And Optical Properties Of ZnO:Al Thin Film Keum, M.J., Yang, J.S., Son, I.H., Shin, S.K., Choi, H.W., Lee, W.S., Choi, M.K., Chu, S.N., Kim, K.H. Materials Research Society
5 Conference Proceedings Electrical Properties of the La2O3/4H-SiC Interface Prepared by Atomic Layer Deposition Using La(iPrCp)3 and H2O Moon, J.H., Eom, D.I., No, S.Y., Song, H.K., Yim, J.H., Na, H.J., Lee, J.B., Kim, H.J. Trans Tech Publications	11 Conference Proceedings High-performance 193-nm photoresist materials based on ROMA polymers: sub-90-nm contact hole application with resist reflow Joo, H.S., Seo, D.C., Kim, C.M., Lim, Y.T., Cho, S.D., Lee, J.B., Song, J.Y., Kim, K.M., Park, J.H., Jung, J.C., Shin, … SPIE - The International Society of Optical Engineering
6 Conference Proceedings Electrical Properties of Atomic-Layer-Deposited La2O3/Thermal-Nitrided SiO2 Stacking Dielectric on 4H-SiC(0001) J.H. Moon, K.Y. Cheong, D.I. Eom, H.K. Song, J.H. Yim, J.H. Lee, H.J. Na, W. Bahng, N.K. Kim, H.J. Kim Trans Tech Publications	12 Conference Proceedings Modification of Surface Layer during High Temperature Annealing and its Effects on the SiC Diode Characteristics W. Bahng, H.J. Cheong, I.H. Kang, S.J. Kim, S.C. Kim, S.J. Joo, N.K. Kim Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12