Hexagonal Faceted SiC Nanopillars Fabricated by Inductively Coupled SF6/O2 Plasma Method
- Author(s):
- Publication title:
- Silicon carbide and related materials 2011 : selected, peer reviewed papers from the 14th International Conference on Silicon Carbide and Related Materials 2011 (ICSCRM 2011), September 11-16, 2011, Cleveland, Ohio, USA
- Title of ser.:
- Materials science forum
- Ser. no.:
- 717-720
- Pub. Year:
- 2012
- Pt.:
- 2
- Page(from):
- 893
- Page(to):
- 896
- Pages:
- 4
- Pub. info.:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
Similar Items:
Trans Tech Publications |
Society of Photo-optical Instrumentation Engineers |
Trans Tech Publications |
Electrochemical Society |
Trans Tech Publications |
9
Conference Proceedings
Mechanism of Orientation Selection for the Growth Of (111) Twin Boundary Free 3C-SiC Single Crystals on Hexagonal Basis
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
11
Conference Proceedings
Characterization of Bulk <> 3C-SiC Single Crystals Grown on 4H-SiC by the CF-PVT Method
Trans Tech Publications |
6
Conference Proceedings
Inductively Coupled Plasma Etching of SiC for Power Switching Device Fabrication
Trans Tech Publications |
Materials Research Society |