Blank Cover Image

Behavior of Particles in the Growth Reactor and their Effect on Silicon Carbide Epitaxial Growth

Author(s):
Publication title:
Silicon carbide and related materials 2011 : selected, peer reviewed papers from the 14th International Conference on Silicon Carbide and Related Materials 2011 (ICSCRM 2011), September 11-16, 2011, Cleveland, Ohio, USA
Title of ser.:
Materials science forum
Ser. no.:
717-720
Pub. Year:
2012
Pt.:
1
Page(from):
153
Page(to):
156
Pages:
4
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Comparison of 4H Silicon Carbide Epitaxial Growths at Various Growth Pressures Using Dicholorosilane and Silane Gases

T. Rana, H.Z. Song, M.V.S. Chandrashekhar, T.S. Sudarshan

Trans Tech Publications
7 Conference Proceedings Investigation of Basal Plane Dislocation Reduction/Elimination by Molten KOH-NaOH Eutectic Etching Method

H.Z. Song, T.S. Sudarshan

Trans Tech Publications
2 Conference Proceedings Effect of C/Si Ratio and Nitrogen Doping on 4H-SiC Epitaxial Growth Using Dichlorosilane Precursor

H.Z. Song, M.V.S. Chandrashekhar, T.S. Sudarshan

Trans Tech Publications
8 Conference Proceedings Growth of Low Basal Plane Dislocation Density SiC Epitaxial Layers

Zhang, Z.H., Sudarshan, T.S.

Trans Tech Publications
3 Conference Proceedings Study of SiC Epitaxial Growth Using Tetrafluorosilane and Dichlorosilane in Vertical Hotwall CVD Furnace

A. Balachandran, H.Z. Song, T.S. Sudarshan, S.S. Shetu, M.V.S. Chandrashekhar

Trans Tech Publications
9 Conference Proceedings Performance of Silicon Carbide PiN Diodcs Fabricated on Basal Plane Dislocation-Free Epilayers

Zhang, Z.H., Grekov, A.E., Sadagopan, P., Maximenko, S.I., Sudarshan, T.S.

Trans Tech Publications
4 Conference Proceedings In-Grown Stacking Faults in SiC-CVD Using Dichlorosilane and Propane as Precursors

H.Z. Song, S.U. Omar, T. Rana, M.V.S. Chandrashekhar, T.S. Sudarshan

Trans Tech Publications
10 Conference Proceedings Initial Stage of Crystallization in the Growth of Silicon Carbide on Substrate with Micropipes

Khlebnikov, I. I., Cherednichenko, D. I., Khlebnikov, Y., Sudarshan, T. S.

Trans Tech Publications
5 Conference Proceedings Room Temperature Photoluminescence from 4H-SiC Epilayers: Non-Destructive Estimation of In-Grown Stacking Fault Density

S.U. Omar, H.Z. Song, T.S. Sudarshan, M.V.S. Chandrashekhar

Trans Tech Publications
11 Conference Proceedings A Technique for Rapid Thick Film SiC Epitaxial Growth

Khlebnikov, I., Sudarshan, T. S., Madangarli, V., Capano, M. A.

MRS - Materials Research Society
6 Conference Proceedings Study of Epitaxial Graphene on Non-Polar 6H-SiC Faces

B.K. Daas, K.M. Daniels, S. Shetu, T.S. Sudarshan, M.V.S. Chandrashekhar

Trans Tech Publications
12 Conference Proceedings SiC Epitaxial Growth on Carbon

Khlebnikov, I., Madangarli, V., Sudarshan, T. S.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12