Fabrication and Precise Alignment of Electron Lenses in the Microcolumn Using the Laser Diffraction Pattern

Fabrication and Precise Alignment of Electron Lenses in the Microcolumn Using the Laser Diffraction Pattern

Author(s):

Publication title:

Eco-materials processing and design XII : selected, peer reviewed papers from the 12th International Symposium on Eco-Materials Processing and Design, January 8-11, 2011, Chiang Mai, Thailand

Title of ser.:

Materials science forum

Ser. no.:

695

Pub. Year:

2011

Page(from):

589

Page(to):

593

Pages:

5

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00054192
Series ID:	PA00000012
Conf. info. (Name):	International Symposium on Eco-Materials Processing and Design
Conf. info. (Number):	12th
Conf. info. (Venue):	Chiang Mai, Thailand
Conf. info. (Date):	2011.01.08-2011.01.11
Note for article:	12th International Symposium on Eco-Materials Processing and Design, January 8-11, 2011, Chiang Mai, Thailand

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