Vacuum Adhesive Bonding and Stress Isolation for MEMS Resonant Pressure Sensor Package
- Author(s):
- Publication title:
- Frontier of nanoscience and technology : Selected, peer reviewed papers from the international conference on Frontier of Nanoscience and Technology (ICFNST 2011), held in Kunming, China, 28-29 September 2011
- Title of ser.:
- Materials science forum
- Ser. no.:
- 694
- Pub. Year:
- 2011
- Page(from):
- 896
- Page(to):
- 900
- Pages:
- 5
- Pub. info.:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
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