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The Important Role of Oxidant in Copper Interconnection Chemical Mechanical Polishing for GLSI

Author(s):
Publication title:
Optoelectronic materials : Selected, peer reviewed papers from the 2010 International Conference on Optical, Electronic and Electrical Materials, August 1-4, Kunming, China, OEEM 2010
Title of ser.:
Materials science forum
Ser. no.:
663-665
Pub. Year:
2010
Pt.:
2
Page(from):
1111
Page(to):
1114
Pages:
4
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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