Comparison of Bonding of Bulk PZT to Silicon by Intermediate Glass Layer and by Intermediate Au Layer

Comparison of Bonding of Bulk PZT to Silicon by Intermediate Glass Layer and by Intermediate Au Layer

Author(s):

Publication title:

Optoelectronic materials : Selected, peer reviewed papers from the 2010 International Conference on Optical, Electronic and Electrical Materials, August 1-4, Kunming, China, OEEM 2010

Title of ser.:

Materials science forum

Ser. no.:

663-665

Pub. Year:

2010

Pt.:

1

Page(from):

490

Page(to):

493

Pages:

4

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00054167
Series ID:	PA00000012
Conf. info. (Name):	International Conference on Optical, Electronic and Electrical Materials
Conf. info. (Number):	2010
Conf. info. (Venue):	Kunming, China
Conf. info. (Date):	2010.08.01-2010.08.04
Note for article:	2010 International Conference on Optical, Electronic and Electrical Materials, August 1-4, Kunming, China

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