Effect of Various CF4/CH4 Flow Ratios on Structure and Optical Band Gap of Fluorinated Diamond-Like Carbon Thin Films

Effect of Various CF₄/CH₄ Flow Ratios on Structure and Optical Band Gap of Fluorinated Diamond-Like Carbon Thin Films

Author(s):

Publication title:

Optoelectronic materials : Selected, peer reviewed papers from the 2010 International Conference on Optical, Electronic and Electrical Materials, August 1-4, Kunming, China, OEEM 2010

Title of ser.:

Materials science forum

Ser. no.:

663-665

Pub. Year:

2010

Pt.:

1

Page(from):

312

Page(to):

315

Pages:

4

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00054167
Series ID:	PA00000012
Conf. info. (Name):	International Conference on Optical, Electronic and Electrical Materials
Conf. info. (Number):	2010
Conf. info. (Venue):	Kunming, China
Conf. info. (Date):	2010.08.01-2010.08.04
Note for article:	2010 International Conference on Optical, Electronic and Electrical Materials, August 1-4, Kunming, China

Similar Items:

1 Conference Proceedings OPTICAL BAND GAP OF DIAMOND-LIKE CARBON FILMS AS A FUNCTION OF RF SUBSTRATE BIAS Pastel, P.W., Varhue, W.J. Materials Research Society	7 Conference Proceedings Growth Spindle-Like ZnO Nanocrystalline Thin Films on Nickel Layers by Dc Magnetron Sputtering and its Thermal Annealing Properties W. Wu, X.H. Xiao, T.C. Peng, C.Z. Jiang Trans Tech Publications
2 Conference Proceedings Evolution of CBD-In(OH)_xSy Thin Film Band Structure with Its Optical Band Gap N. Barreau, R. Bayón, J. C. Bernéde, L. Assmann Electrochemical Society	8 Conference Proceedings Fabrication of Structure-Designed Free-Standing Diamond Film Zhou, Y. L., Chen, G. C., Chen, G., Li, C. M., Tong, Y. M., Lu, F. X. Trans Tech Publications
3 Conference Proceedings THIN FILMS OF DIAMOND-LIKE CARBON Kervin, David B., Daudin, Bruno, Dubus, Michel, Fotenille, J., Robinson, Raymon S., Spain, Ian L. Materials Research Society	9 Conference Proceedings Diagnostics of nitrogen-implanted diamond-like carbon films by optical and microhardness measurements Artamonov,V.V., Klyui,N.I., Romanykuk,B.N., Valakh,M.Ya., Vasylyk,O.V., Semenovich,V.A., Perez-Rodriguez,A., … SPIE-The International Society for Optical Engineering
4 Conference Proceedings Fluorinated diamond-like carbon films produced by plasma immersion ion processing technique Hakovirta, M., Lee, D. H., He, X. M., Nastasi, M. MRS-Materials Research Society	10 Conference Proceedings Structures and optical properties of indium doped SrTiO₃ thin films by oxygen plasmaassisted putsed laser deposition Y. Zhang, X. Li, W. Yu, X. Gao, F. Wu Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings Effect of the Temperature on Diamond-Like Carbon (DLC) Thin Film Based on LIS Huang, Lei, Yuan, Jun Tang, Wang, Zhen Hua, Yu, Bin Bin Trans Tech Publications	11 Conference Proceedings Chemical Bonds Properties and Spontaneous Polarization of Orthogonal SrBi₂Ta₂O₉ Crystals X.H. Xiao, S.C. Li Trans Tech Publications
6 Conference Proceedings Liquid target pulsed laser deposition and its applications to growing diamond/diamondlike carbon and gallium nitride thin films Xiao,R., Li,Z.F., Sun,X.W., Kwok,H.S. SPIE-The International Society for Optical Engineering	12 Conference Proceedings The effect of material inhomogeneity on serrated plastic flows Li, X., Tong, W. MRS-Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12