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Effect of Atmosphere on the Crystallization of Amorphous Silicon Nitride

Author(s):
Publication title:
Eco-materials processing and design XI : ISEPD-11 : selected, peer reviewed papers from the 11th International Symposium on Eco-Materials Processing and Design, Osaka, Japan, January 9-12, 2010
Title of ser.:
Materials science forum
Ser. no.:
658
Pub. Year:
2010
Page(from):
344
Page(to):
347
Pages:
4
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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