Blank Cover Image

Chloride-Based CVD at High Growth Rates on 3″ Vicinal Off-Angles SiC Wafers

Author(s):
Publication title:
Silicon carbide and related materials 2009 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2009, Nurnberg, Germany, October 11-16, 2009
Title of ser.:
Materials science forum
Ser. no.:
645-648
Pub. Year:
2010
Pt.:
1
Page(from):
107
Page(to):
110
Pages:
4
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

Similar Items:

S. Leone, H. Pedersen, A. Henry, O. Kordina, E. Janzén

Trans Tech Publications

X. Li, S. Leone, S. Andersson, O. Kordina, A. Henry

Trans Tech Publications

S. Leone, H. Pedersen, F.C. Beyer, S. Andersson, O. Kordina

Trans Tech Publications

H. Pedersen, S. Leone, A. Henry, F.C. Beyer, V. Darakchieva

Trans Tech Publications

3 Conference Proceedings CVD Growth of 3C-SiC on 4H-SiC Substrate

A. Henry, X. Li, S. Leone, O. Kordina, E. Janzén

Trans Tech Publications

M. Yazdanfar, H. Pedersen, O. Kordina, E. Janzén

Trans Tech Publications

A. Henry, S. Leone, S. Andersson, O. Kordina, E. Janzén

Trans Tech Publications

M. Yazdanfar, S. Leone, H. Pedersen, O. Kordina, A. Henry

Trans Tech Publications

A. Henry, S. Leone, F.C. Beyer, S. Andersson, O. Kordina

Trans Tech Publications

11 Conference Proceedings Chloride-Based SiC Epitaxial Growth

H. Pedersen, S. Leone, A. Henry, F.C. Beyer, A. Lundskog

Trans Tech Publications

A. Henry, S. Leone, H. Pedersen, O. Kordina, E. Janzén

Trans Tech Publications

Zhang, J., Forsberg, U., Isacson, M., Ellison, A., Henry, A., Kordina, O., Janzen, E.

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12