Characterization of Lanthanoid and Aluminum Based Oxide Film for Wide Bandgap Semiconductors
- Author(s):
- Publication title:
- THERMEC 2009, 6th International Conference on PROCESSING & MANUFACTURING OF ADVANCED MATERIALS, Berlin, Germany, August 25-29, 2009
- Title of ser.:
- Materials science forum
- Ser. no.:
- 638-642
- Pub. Year:
- 2010
- Pt.:
- 4
- Page(from):
- 3943
- Page(to):
- 3948
- Pages:
- 6
- Pub. info.:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
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