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The Study on the Surface Abrasion about Wafer Final Polishing

Author(s):
Publication title:
Advances in Materials Manufacturing Science and Technology XIII Volume 1 - Advanced Manufacturing Technology and Equipment, and Manufacturing Systems and Automation : selected, peer reviewed papers from the 13th International Manufacturing Conference in China, September 21-23, 2009, Dalian, China
Title of ser.:
Materials science forum
Ser. no.:
626-627
Pub. Year:
2009
Page(from):
147
Page(to):
152
Pages:
6
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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