Single Crystal and Polycrystalline 3C-SiC for MEMS Applications
- Author(s):
- Publication title:
- Silicon carbide and related materials 2008 : selected peer reviewed papers from the 7th European Conference on Silicon Carbide and Related Materials, September 7-11 Barcelona, Spain
- Title of ser.:
- Materials science forum
- Ser. no.:
- 615-617
- Pub. Year:
- 2009
- Page(from):
- 625
- Page(to):
- 628
- Pages:
- 4
- Pub. info.:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
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