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Deposition of Titanium Nitride Thin Films onto Silicon by RF Reactive Magnetron Sputtering

Author(s):
Publication title:
Thin films and porous materials : selected, peer reviewed papers from the First International Conference on Thin Films and Porous Materials, - ICTFPM'08, organized in Algiers on May 19 to 22, 2008
Title of ser.:
Materials science forum
Ser. no.:
609
Pub. Year:
2009
Page(from):
117
Page(to):
122
Pages:
6
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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