Evaluation of atomic force microscopy: comparison with electrical CD metrology and low-voltage scanning electron microscopy
- Author(s):
- Publication title:
- Metrology, inspection, and process control for microlithography XIII : 15-18 March, 1999, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3677
- Pub. Year:
- 1999
- Vol.:
- 1
- Page(from):
- 43
- Page(to):
- 52
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431516 [0819431516]
- Language:
- English
- Call no.:
- P63600/3677
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society for Optical Engineering |
American Institute of Chemical Engineers |
2
Conference Proceedings
Atomic Force and Scanning Electron Microscopy of Corrosion and Fatigue of an Aluminum-Copper Alloy
MRS - Materials Research Society |
8
Conference Proceedings
Atomic force microscopy for phase metrology of alternating-aperture phase-shift masks
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
4
Conference Proceedings
Methodology to set up accurate OPC model using optical CD metrology and atomic force microscopy
SPIE - The International Society of Optical Engineering |
10
Conference Proceedings
Scatterometry based CD and profile metrology of chrome-less masks using optical digital profilometry [6283-111]
SPIE - The International Society of Optical Engineering |
5
Conference Proceedings
Atomic force-, confocal laser scanning-, and scanning electron microscopy characterization of the surface degradation of a polymer
American Chemical Society |
11
Conference Proceedings
Contact hole CD and profile metrology of binary and phase-shift masks: effect of modeling strategies in application of scafferometery [6349-22]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |