Challenges of High Aspect Ratio Oxide Etching
- Author(s):
- Publication title:
- Plasma Processing 17
- Title of ser.:
- ECS transactions
- Ser. no.:
- 13(8)
- Pub. Year:
- 2008
- Page(from):
- 47
- Page(to):
- 54
- Pages:
- 8
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781605606439 [160560643X]
- Language:
- English
- Call no.:
- E23400/13-4 [8]
- Type:
- Conference Proceedings
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