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A Study of Electrical Properties of SiGe Film with Various Oxidation Conditions

Author(s):
Publication title:
Student Posters (General)
Title of ser.:
ECS transactions
Ser. no.:
11(20)
Pub. Year:
2008
Page(from):
91
Page(to):
100
Pages:
10
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781605601939 [1605601934]
Language:
English
Call no.:
E23400/11-15 [20]
Type:
Conference Proceedings

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