Blank Cover Image

High-Performance CMP Slurry with CeO2/Resin Abrasive for STI Formation

Author(s):
Publication title:
ULSI process integration 5
Title of ser.:
ECS transactions
Ser. no.:
11(6)
Pub. Year:
2007
Page(from):
277
Page(to):
283
Pages:
7
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775724 [1566775728]
Language:
English
Call no.:
E23400/11-6
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings High-Performance CMP Slurry with Inorganic/Resin Abrasive for Al/Low-k Damascene

Yano, Hiroyuki, Matsui, Yukiteru, Minamihaba, Gaku, Kawahashi, Nobuo, Hattori, Masayuki

Materials Research Society
7 Conference Proceedings A Study of the Planarity by STI CMP Erosion Modeling

Chung, U. I., Hah, S. R., Han, J. H., Hong, C. K., Kang, G. W., Kim, K. H.

Materials Research Society
2 Conference Proceedings Photo-enhanced Electrochemical Mechanical Polishing for Cu Damascene

Yano, H., Matsui, Y., Minamihaba, G., Tateyama, Y.

Electrochemical Society
8 Conference Proceedings The Effect of Mixed Abrasive Slurry on CMP of 6H-SiC Substrate

H.J. Lee, B.Y. Park, H.S. Lee, S.H. Jeong, H.D. Seo

Trans Tech Publications
3 Conference Proceedings Study on Nano-Scale Wear of Silicon Oxide in CMP Processes

Seta, S., Nishiok.a, T., Tateyama, Y., Miyashita, N.

Electrochemical Society
9 Conference Proceedings Film Thickness Monitor for CMP Processing

Atsuta, H., Hayashi, T., Hondo, N., Horie, M., Kimura, H., Okumura, K., Tsujimura, M., Yano, H., Yoshida, M.

Materials Research Society
4 Conference Proceedings Mechanochemical Synthesis of Nano-Sized CeO2 and its Application for CMP Slurry

Lim, G., Lee, J.H., Kim, J.S., Lee, H.W., Hyun, S.H.

Trans Tech Publications
10 Conference Proceedings Two-Dimensional Mapping of Localized Characteristics of Concentrator Photovoltaic Module

H. Yano, H. Nagai, K. Tamura, K. Araki, K. Nishioka

Trans Tech Publications
5 Conference Proceedings Study on Ceria-Based Slurry for STI Planarization

Tateyama, Yoshikuni, Hirano, Tomoyuki, Ono, Takatoshi, Miyashita, Naoto, Yoda, Takashi

Electrochemical Society
11 Conference Proceedings Aggregate Behavior in Metal CMP Slurries

Tamboli, D.C., Desai, V.H., Dogariu, A., Sundaram, K.B., Maury, A., Obeng, Y.

Electrochemical Society
6 Conference Proceedings Application of BIS-2-Oxazoline/Bismaleimide Resins to High-Performance Composites

Jones D. K., Ho -H. L., DiBenedetto T. A., Huang J. S.

Society of Plastics Engineers, Inc. (SPE)
12 Conference Proceedings Modeling on Mechanical Properties of Polishing Pads in CMP Process

Nishioka, Takeshi, Iwami, Satoko, Kawakami, Takashi, Tateyama, Yoshikuni, Ohtani, Hiroshi, Miyashita, Naoto

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12