Junction Photovoltage (JPV) Techniques for Ultra-Shallow Junction Characterization

Junction Photovoltage (JPV) Techniques for Ultra-Shallow Junction Characterization

Author(s):

Publication title:

Analytical and diagnostic techniques for semiconductor materials, devices and processes 7

Title of ser.:

ECS transactions

Ser. no.:

11(3)

Pub. Year:

2007

Page(from):

135

Page(to):

147

Pages:

13

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781566775694 [1566775698]

Language:

English

Call no.:

E23400/11-3

Type:

Conference Proceedings

Details

TDL ID:	ZA00013285
Series ID:	PA00000034
Conf. info. (Name):	ECS Meeting
Conf. info. (Number):	212th
Conf. info. (Venue):	Washington, DC, USA
Conf. info. (Date):	2007.10.07-2007.10.12
Note for article:	212th ECS Meeting, October 7 - October 12, 2007, Washington, DC

Similar Items:

1 Conference Proceedings Electrical Characterization of Ultra Shallow Dopant Profiles Clarysse,T., Vandervorst,W., Coilart,E.J.H., Murrell,A.J. SPIE - The International Society for Optical Engineering	7 Conference Proceedings Non-Contact Electrical Measurements of Sheet Resistance and Leakage Current Density for Ultra-Shallow (and Other) Junctions Faifer, Vladimir N., Current, Michael I., Walecki, Wojtek, Soucnkov, Vitali, Mikhaylov, Georgy, Van, Phuc, Wong, Tim, … Materials Research Society
2 Conference Proceedings Accurate Sheet Resistance Measurement on Ultra-Shallow Profiles Trudo Clarysse, Alain Moussa, Frederik Leys, Roger Loo, Wilfried Vandervorst, Mark C. Benjamin, Robert J. Hillard, … Materials Research Society	8 Conference Proceedings State of the Art Techniques for Ultra-Shallow Junction Formation Lerch, W., Bayha, B., Downey, D.F., Arevalo, E. Electrochemical Society
3 Conference Proceedings High-Resolution Junction Photo-Voltage Mapping of Sheet Resistance and Leakage Current Variations with ms-Timescale Annealing Methods V. Faifer, M.I. Current, N. Ohno, J. Halim, J. Lu Electrochemical Society	9 Conference Proceedings The Role of Preamorphization and Activation for Ultra Shallow Junction Formation on Strained Si Layers Grown on SiGe Buffer Pawlak, B.J., Vandervorst, W., Lindsay, R., Wolf, I.De, Roozeboom, F., Delhougne, R., Benedetti, A., Loo, R., Caymax, … Materials Research Society
4 Conference Proceedings 56 Dopants for n and p Junctions in Germanium Satta, A., Simoen, E., Meuris, M., Janssens, T., Clarysse, T., Demeurisse, C., Hoflijk, I., Vandervorst, W. Electrochemical Society	10 Conference Proceedings The Role of Preamorphization and Activation for Ultra-Shallow Junction Formation on Strained Si Layers Grown on SiGe Buffer Pawlak, B.J., Vandervorst, W., Lindsay, R., Wolf, I.De, Roozeboom, F., Delhougne, R., Benedetti, A., Loo, R., Caymax, … Materials Research Society
5 Conference Proceedings Two Dimensional Carrier Profiling Using Scanning Capacitance Microscopy Duhayon, N., Clarysse, T., Alvarez, D., Eyben, P., Fouchier, M., Vandervorst, W.J., Hellemans, L. Electrochemical Society	11 Conference Proceedings ULSI Device Characterization Using Nano-SRP* De Wolf,P., Trenkler,T., Clarysse,T., Vandervorst,W. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Two Dimensional Carrier Profiling Using Scanning Capacitance Microscopy Duhayon, N., Clarysse, T., Alvarez, D., Eyben, P., Fouchier, M., Vandervorst, W., Hellemans, L. SPIE-The International Society for Optical Engineering	12 Conference Proceedings ULSI Device Characterization Using Nano-SRP De Wolf, P., Trenkler, T., Clarysse, T., Vandervorst, W. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12