Blank Cover Image

Local Removal Frequency of Nano Particles in Megasonic Cleaning

Author(s):
Publication title:
Cleaning and surface conditioning technology in semiconductor device manufacturing 10
Title of ser.:
ECS transactions
Ser. no.:
11(2)
Pub. Year:
2007
Page(from):
353
Page(to):
360
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775687 [156677568X]
Language:
English
Call no.:
E23400/11-2
Type:
Conference Proceedings

Similar Items:

K.L. Wostyn, K. Sano, A. Eitoku, T. Janssens, T. Bearda

Electrochemical Society

Vereecke, G., Holsteyns, F., Veltens, J., Lux, M., Amauts, S., Kenis, K., Vos, R., Mertens, P., Heyns, M.

Electrochemical Society

C. De Marco, K.L. Wostyn, T. Bearda, K. Sano, K. Kenis

Electrochemical Society

Resnick, P.J., Adkins, C.L.J., Clews, P.J., Thomas, E.V., Cannaday, S.T.

Electrochemical Society

F. Barbagini, T. Janssens, T. Bearda, S. Armini, J. Van Hoeymissen

Electrochemical Society

Cohen, S. L., Rath, D., Lee, G., Furman, B., Pope, K. R., Tsai, R., Syverson, W., Gow, C., Liehr, M.

MRS - Materials Research Society

T. Fischer, S. Puri, R. Hoyer, K.L. Wostyn, T. Janssens

Electrochemical Society

Lauerhaas, J., Wu, Y., Xu, K., Vereecke, G., Vos, R., Kenis, K., Mertens, P., Nicolosi, T., Heyns, M.

Electrochemical Society

T. Kim, K.L. Wostyn, P. Mertens, A.A. Busnaina, J. Park

Electrochemical Society

Kubo, K., Ojima, S., Toda, M., Ohmi, T.

Electrochemical Society

G.G. Totir, M. Frank, R. Vos, S. Arnauts, T. Bearda

Electrochemical Society

Takeuchi, K., Tomozawa, A., Onishi, A., Tanzawa, A., Azuma, T., Umemura, S.-I., Wu, Y., Bran, M., Fraser, B.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12